Large area vacuum coating via sheet-to-sheet processes
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Offering type ?
PRODUCT:
Component or system, which is commercialized. It is available for ordering multiple pieces and liability is assumed by the provider/seller. Necessary certification of the product was obtained (e.g. CE certification). The product sheet and/or conditions of use are defined.
PROTOTYPE:
Component or system, which has been successfully tested under real or real-like conditions. The prototype is not commercialized as the main purpose is to use it for demonstration and experimentation, including user and market acceptance.
TECHNICAL SERVICE:
Tools and processes and its combination, which are necessary to prepare and test prototypes or products.
- Service
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Market
- AR/VR
- Automotive
- Consumer electronics
- Decoration & Luxury
- Healthcare & Life Sciences
- Imagers & Displays
- Optical instrumentation
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Manufacturing Pillar
- Wafer-scale
- Roll-2-Plate
- Roll-2-Roll
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Technology
- Magnetron Sputtering
We develop coatings and layer systems on flat substrates using sputtering technologies. Our special expertise is in the field of pulse magnetron sputtering (PMS) and the control of reactive sputter processes and their optimization for application-relevant requirements.
Offering Description
- feasibility studies on new layer systems for specific applications
- development of sputtering processes for functional layer systems
and single layers under near-real production conditions - small series production for market introduction of new products
- adaptation and supply of key components (for example power supplies, pulse and control units, also as integrated packages) for example for modernizing or expanding existing production plants
Offering Specifications
multi-chamber in-line plant with:
- 8 process chambers which can be fitted with:
- 5 planar DMS systems, target length 900 mm
- 2 × 2 planar single magnetrons, target length 750 mm
- 1 rotatable cathode DMS system, target length 780 mm
- 2 inverted RF sputter-etchers, length 750 mm
- parallel and separately operable plant sides (inkl. reversing chamber and transport in the clean room)
- coating area: 1200 x 600 mm^2
- 2 heating chambers
- base pressure: 2 × 10-6 mbar
- working pressure 10-4 … 10-2 mbar
